Last edited by Gurr
Monday, July 13, 2020 | History

4 edition of Foundations of MEMS found in the catalog.

Foundations of MEMS

by Liu, Chang Ph.D.

  • 357 Want to read
  • 14 Currently reading

Published by Pearson Prentice Hall in Upper Saddle River, NJ .
Written in English

    Subjects:
  • Microelectromechanical systems.

  • Edition Notes

    Includes index.

    StatementChang Liu.
    Classifications
    LC ClassificationsTK7875 .L48 2005
    The Physical Object
    Paginationp. cm.
    ID Numbers
    Open LibraryOL3425513M
    ISBN 100131472860
    LC Control Number2005048932

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